[1]
Han, C., Chen, D., Zhang, Y., Xu, D., Liu, Y., Kong, E.S.-W. and Zhang, Y. 2012. High Potential Columnar Nanocrystalline AlN Films Deposited by RF Reactive Magnetron Sputtering. Nano-Micro Letters. 4, 1 (Mar. 2012), 40-44. DOI:https://doi.org/10.1007/BF03353690.