MA, Z.; JIANG, C.; YUAN, W.; HE, Y. Large-scale Patterning of Hydrophobic Silicon Nanostructure Arrays Fabricated by Dual Lithography and Deep Reactive Ion Etching. Nano-Micro Letters, [S. l.], v. 5, n. 1, p. 7-12, 2013. DOI: 10.1007/BF03353725. Disponível em: https://nmlett.org/index.php/nml/article/view/673. Acesso em: 25 apr. 2024.