SUN, S.; LU, P.; XU, J.; XU, L.; CHEN, K.; WANG, Q.; ZUO, Y. Fabrication of Anti-reflecting Si Nano-structures with Low Aspect Ratio by Nano-sphere Lithography Technique. Nano-Micro Letters, [S. l.], v. 5, n. 1, p. 18-25, 2013. DOI: 10.1007/BF03353727. Disponível em: https://nmlett.org/index.php/nml/article/view/675. Acesso em: 6 may. 2024.