Highly ordered TiO2 nano-pore arrays fabricated from a novel polymethylmethacrylate/polydimethylsiloxane soft template
Corresponding Author: W. X. Que
Nano-Micro Letters,
Vol. 2 No. 1 (2010), Article Number: 1-5
Abstract
A novel soft polymer template containing a double-layer structure, which includes a thin layer of polymethylmethacrylate (PMMA) used as a pattern layer and a thicker layer of polydimethylsiloxane (PDMS) used as a back layer, was fabricated from a replica molding process. Anodic aluminum oxide (AAO) template was used as the replica mold to be replicated to the polymethylmethacrylate layer by a thermal infiltration process under a vacuum condition. Results indicate that PMMA/PDMS soft templates with different sizes could be easily fabricated from the as-prepared AAO replica mold. The PMMA/PDMS soft templates were then employed to imprint a TiO2 gel for achieving TiO2 nano-pore arrays. After the imprinting process, the PDMS layer was firstly peeled off and the PMMA layer was then removed into acetonitrile, which can avoid any demolding problems like damages or distortions. The TiO2 nano-pore arrays with the crystalline of anatase could be obtained at a heat treatment temperature of 450°C.
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References
S. Y. Chou, P. R. Krauss and P. J. Renstrom, Appl. Phys. Lett. 67, 3114 (1995). doi:10.1063/1.114851
H. Schulz, D. Lyebyedyev and H. C. Scheer, J. Vac. Sci. Technol. B 18, 3582 (2000).doi:10.1116/1.1319821
M. Tormen, L. Businaro and M. Altissimo, Microelectron. Eng. 73–74, 535 (2004). doi:10.1016/S0167-9317(04) 00134-0
S. Park, S. Saxer, C. Padeste, H. H. Solak, J. Gobrecht and H. Schift, Microelectron. Eng. 78–79, 682 (2005). doi:10.1016/j.mee.2004.12.085
H. Schift and J. Vac, Sci. Technol. B 26, 458 (2008). doi:10.1116/1.2890972
A. Bietscha and B. Michel, J. Appl. Phys. 88, 4310 (2000). doi:10.1063/1.1289816
K. Liu, S. Fournier Bidoz, G. A. Ozin and I. Manners, Chem. Mater. 21, 1781 (2009). doi:10.1021/cm900164b
Cao. Y and T. E. Mallouk, Chem. Mater. 20, 5260 (2008). doi:10.1021/cm801028a
A. Johansson, E. Widenkvist, J. Lu, M. Boman and U. Jansson, Nano. Lett. 5, 1603 (2005). doi:10.1021/nl050964u
D. Guo, L. Fan, J. Sang. Y. Liu, S. Huang and X. Zou, Nanotechnology 18, 405304 (2007). doi:10.1088/0957-4484/18/40/405304
A. P. Li, F. Muller, A. Birner, K. Nielsch and U. Gosele, J. Appl. Phys. 84, 6023 (1998). doi:10.1063/1.368911
H. Masuda and K. Fukuda, Science 268, 1466 (1995). doi:10.1126/science.268.5216.1466
O. Jessensky, F. Muller and U. Gosele, Appl. Phys. Lett. 72, 1173 (1998). doi:10.1063/1.121004
H. Masuda, K. Yada and A. Osaka, Jpn. J. Appl. Phys. 37, 1340 (1998). doi:10.1143/JJAP.37.L1340
C. Goh, K. M. Coakley and M. D. McGehee,Nano Lett. 5, 1545 (2005). doi:10.1021/nl050704c
S. S. Williams, M. J. Hampton, V. Gowrishankar and I. Ding. Chem. Mater. 20, 5229 (2008). doi:10.1021/cm800729q
S. Banerjee, S. K. Mohapatra, M. Misra and I. B. Mishra. Nanotech. 20, 075502 (2009). doi:10.1088/0957-4484/20/7/075502
D. Wang, Y. Liu, B. Yu, F. Zhou and W. Liu. Chem. Mater. 21, 1198 (2009). doi:10.1021/cm802384y
A. Schroeder, G. Francz and A. Bruinink, Biomaterials 21, 449 (2000). doi:10.1016/S0142-9612(99)00135-0
W. X. Que, A. Uddin and X. Hu, J. Power Sources 159, 353 (2006).doi:10.1016/j.jpowsour.2006.04.009
M. J. Alam and D. C. Cameron, J. Sol-Gel Sci. Tech. 25, 137 (2002).
K. Pomoni, A. Vomvas and C. Trapalis, Thin Solid Films 479, 160 (2005). doi:10.1016/j.tsf.2004.12.005
T. Yanagishita, T. Kondo, K. Nishio and H. Masuda, J. Vac. Sci. Tech. B 26, 1856 (2008). doi:10.1116/1.2998731
M. Aryal, F. Buyukserin, K. Mielczarek, X. M. Zhao and J. M. Gao, J. Vac. Sci. Tech. B 26, 2562 (2008). doi:10.1116/1.2981076
D. Cheyns, K. Vasseur, C. Rolin, J. Genoe, A. Poortmans and J. P. Heremans, Nanotechnology 19, 424016 (2008). doi:10.1088/0957-4484/19/42/424016
E. Mele and A. Camposeo, Small 4, 1894 (2008). doi:10.1002/smll.200800210