Issue

Vol. 18 (2026)

Vapor Deposition Engineering for Thin-Film Microbatteries: From Nanoscale Ionics to Interface-Integrated Architectures

https://doi.org/10.1007/s40820-025-02002-w
Mingming Zheng
Shenzhen Key Laboratory of Solid State Batteries and Guangdong Provincial Key Laboratory of Energy Materials for Electric Power and Guangdong‑Hong Kong‑Macao Joint Laboratory for Photonic‑Thermal‑Electrical Energy Materials and Devices and Institute of Major Scientific Facilities for New Materials and Academy for Advanced Interdisciplinary Studies, Southern University of Science and Technology, Shenzhen 518055, People’s Republic of China
Xinrui Xu
Shenzhen Key Laboratory of Solid State Batteries and Guangdong Provincial Key Laboratory of Energy Materials for Electric Power and Guangdong‑Hong Kong‑Macao Joint Laboratory for Photonic‑Thermal‑Electrical Energy Materials and Devices and Institute of Major Scientific Facilities for New Materials and Academy for Advanced Interdisciplinary Studies, Southern University of Science and Technology, Shenzhen 518055, People’s Republic of China
Xiaofei Wang
Shenzhen Key Laboratory of Solid State Batteries and Guangdong Provincial Key Laboratory of Energy Materials for Electric Power and Guangdong‑Hong Kong‑Macao Joint Laboratory for Photonic‑Thermal‑Electrical Energy Materials and Devices and Institute of Major Scientific Facilities for New Materials and Academy for Advanced Interdisciplinary Studies, Southern University of Science and Technology, Shenzhen 518055, People’s Republic of China
Haibin Lin
Shenzhen Key Laboratory of Solid State Batteries and Guangdong Provincial Key Laboratory of Energy Materials for Electric Power and Guangdong‑Hong Kong‑Macao Joint Laboratory for Photonic‑Thermal‑Electrical Energy Materials and Devices and Institute of Major Scientific Facilities for New Materials and Academy for Advanced Interdisciplinary Studies, Southern University of Science and Technology, Shenzhen 518055, People’s Republic of China
Changmin Hou
State Key Laboratory of Inorganic Synthesis and Preparative Chemistry, Jilin University, Changchun 130012, People’s Republic of China
Jinlong Zhu
Shenzhen Key Laboratory of Solid State Batteries and Guangdong Provincial Key Laboratory of Energy Materials for Electric Power and Guangdong‑Hong Kong‑Macao Joint Laboratory for Photonic‑Thermal‑Electrical Energy Materials and Devices and Institute of Major Scientific Facilities for New Materials and Academy for Advanced Interdisciplinary Studies, Southern University of Science and Technology, Shenzhen 518055, People’s Republic of China
Songbai Han
Shenzhen Key Laboratory of Solid State Batteries and Guangdong Provincial Key Laboratory of Energy Materials for Electric Power and Guangdong‑Hong Kong‑Macao Joint Laboratory for Photonic‑Thermal‑Electrical Energy Materials and Devices and Institute of Major Scientific Facilities for New Materials and Academy for Advanced Interdisciplinary Studies, Southern University of Science and Technology, Shenzhen 518055, People’s Republic of China

Corresponding Author: Songbai Han

hansb@sustech.edu.cn

Nano-Micro Letters, Vol. 18 (2026), Article Number: 159

Abstract

The rapid proliferation of microelectronics, coupled with the advent of the internet of things (IoT) era, has created an urgent demand for miniaturized, integrable, and reliable on-chip energy storage systems. All-solid-state thin-film microbatteries (TFMBs), distinguished by their intrinsic safety, compact design, and compatibility with microfabrication techniques, have emerged as promising candidates to power next-generation IoT devices. Nevertheless, in contrast to the well-established development of conventional lithium-ion batteries, the advancement of TFMBs remains at an early stage, facing persistent challenges in materials innovation, interface optimization, and scalable manufacturing. This review critically examines the pivotal role of vapor deposition technologies, including magnetron sputtering, pulsed laser deposition, thermal/electron-beam evaporation, chemical vapor deposition, and atomic layer deposition, in the fabrication and performance modulation of TFMBs. We systematically summarize recent progress in thin-film electrodes and solid-state electrolytes, with particular emphasis on how deposition parameters dictate crystallinity, lattice orientation, and ionic transport in functional layers. Furthermore, we highlight strategies for solid–solid interface engineering, three-dimensional structural design, and multifunctional integration to enhance capacity retention, cycling stability, and interfacial compatibility. Looking ahead, TFMBs are expected to evolve toward multifunctional platforms, exhibiting mechanical flexibility, optical transparency, and hybrid energy-harvesting compatibility, thereby meeting the heterogeneous energy requirements of future IoT ecosystems. Overall, this review provides a comprehensive perspective on vapor-phase-enabled TFMB technologies, delivering both theoretical insights and technological guidelines for the scalable realization of high-performance microscale power sources.


Highlights:
1 Tailored crystallinity and defect engineering in ultrathin solid-state electrolytes enable enhanced nanoscale ion transport.
2 Chemically stable and conformal interfaces mitigate interfacial failure and space charge effects in microbattery architectures.
3 Spatial atomic layer deposition and scalable vapor-phase strategies enable 3D integration and monolithic interfacing of thin-film microbatteries with internet of things device platforms.

Keywords

Thin-film microbatteries Vapor-phase deposition techniques Nanoscale ionic conductivity Interfacial engineering Microdevice integration
Zheng, Mingming, Xinrui Xu, Xiaofei Wang, Haibin Lin, Changmin Hou, Jinlong Zhu, and Songbai Han. 2026. “Vapor Deposition Engineering for Thin-Film Microbatteries: From Nanoscale Ionics to Interface-Integrated Architectures”. Nano-Micro Letters 18 (January):159. https://doi.org/10.1007/s40820-025-02002-w.
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