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Vol. 10 No. 2 (2018)

A Review on Surface Stress-Based Miniaturized Piezoresistive SU-8 Polymeric Cantilever Sensors

https://doi.org/10.1007/s40820-018-0189-1
Ribu Mathew
School of Electronics Engineering (SENSE), Vellore Institute of Technology (VIT) Chennai, Chennai, Tamil Nadu 600127, India
A. Ravi Sankar
School of Electronics Engineering (SENSE), Vellore Institute of Technology (VIT) Chennai, Chennai, Tamil Nadu 600127, India

Corresponding Author: A. Ravi Sankar

a.ravishan@gmail.com

Nano-Micro Letters, Vol. 10 No. 2 (2018), Article Number: 35

Abstract

In the last decade, microelectromechanical systems (MEMS) SU-8 polymeric cantilevers with piezoresistive readout combined with the advances in molecular recognition techniques have found versatile applications, especially in the field of chemical and biological sensing. Compared to conventional solid-state semiconductor-based piezoresistive cantilever sensors, SU-8 polymeric cantilevers have advantages in terms of better sensitivity along with reduced material and fabrication cost. In recent times, numerous researchers have investigated their potential as a sensing platform due to high performance-to-cost ratio of SU-8 polymer-based cantilever sensors. In this article, we critically review the design, fabrication, and performance aspects of surface stress-based piezoresistive SU-8 polymeric cantilever sensors. The evolution of surface stress-based piezoresistive cantilever sensors from solid-state semiconductor materials to polymers, especially SU-8 polymer, is discussed in detail. Theoretical principles of surface stress generation and their application in cantilever sensing technology are also devised. Variants of SU-8 polymeric cantilevers with different composition of materials in cantilever stacks are explained. Furthermore, the interdependence of the material selection, geometrical design parameters, and fabrication process of piezoresistive SU-8 polymeric cantilever sensors and their cumulative impact on the sensor response are also explained in detail. In addition to the design-, fabrication-, and performance-related factors, this article also describes various challenges in engineering SU-8 polymeric cantilevers as a universal sensing platform such as temperature and moisture vulnerability. This review article would serve as a guideline for researchers to understand specifics and functionality of surface stress-based piezoresistive SU-8 cantilever sensors.


Highlights:


1 A critical review on the design, fabrication, and performance aspects of surface stress-based piezoresistive SU-8 polymeric cantilever sensors is presented.
2 Specifics of evolution of surface stress-based piezoresistive cantilever sensors from solid-state semiconductor materials to SU-8 polymers are detailed.
3 The interdependence of the material selection, geometrical design parameters, and fabrication process of cantilever sensors is explained.
4 Challenges which limit the use of SU-8 cantilevers as a universal sensing platform are presented with potential solutions.

Keywords

SU-8 polymer Surface stress Biological sensor Cantilever Chemical sensor Piezoresistor Immobilization
Mathew, Ribu, and A. Ravi Sankar. 2018. “A Review on Surface Stress-Based Miniaturized Piezoresistive SU-8 Polymeric Cantilever Sensors”. Nano-Micro Letters 10 (2):35. https://doi.org/10.1007/s40820-018-0189-1.
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