Issue

Vol. 6 No. 1 (2014)

Position-resolved Surface Characterization and Nanofabrication Using an Optical Microscope Combined with a Nanopipette/Quartz Tuning Fork Atomic Force Microscope

https://doi.org/10.1007/BF03353771
Sangmin An
Center for Nano-Liquid, Department of Physics and Astronomy, Seoul National University, Daehak-dong, Gwanak-gu, Seoul 151-747, South Korea
Baekman Sung
Center for Nano-Liquid, Department of Physics and Astronomy, Seoul National University, Daehak-dong, Gwanak-gu, Seoul 151-747, South Korea
Haneol Noh
Center for Nano-Liquid, Department of Physics and Astronomy, Seoul National University, Daehak-dong, Gwanak-gu, Seoul 151-747, South Korea
Corey Stambaugh
National Institute of Standards and Technology, MD 20899, USA
Soyoung Kwon
Center for Nano-Liquid, Department of Physics and Astronomy, Seoul National University, Daehak-dong, Gwanak-gu, Seoul 151-747, South Korea
Kunyoung Lee
Center for Nano-Liquid, Department of Physics and Astronomy, Seoul National University, Daehak-dong, Gwanak-gu, Seoul 151-747, South Korea
Bongsu Kim
Center for Nano-Liquid, Department of Physics and Astronomy, Seoul National University, Daehak-dong, Gwanak-gu, Seoul 151-747, South Korea
Qhwan Kim
Center for Nano-Liquid, Department of Physics and Astronomy, Seoul National University, Daehak-dong, Gwanak-gu, Seoul 151-747, South Korea
Wonho Jhe
Center for Nano-Liquid, Department of Physics and Astronomy, Seoul National University, Daehak-dong, Gwanak-gu, Seoul 151-747, South Korea

Corresponding Author: Wonho Jhe

whjhe@snu.ac.kr

Nano-Micro Letters, Vol. 6 No. 1 (2014), Article Number: 70-79

Abstract

In this work, we introduce position-resolved surface characterization and nanofabrication using an optical microscope (OM) combined with a nanopipette-based quartz tuning fork atomic force microscope (nanopipette/QTF-AFM) system. This system is used to accurately determine substrate position and nanoscale phenomena under ambient conditions. Solutions consisting of 5 nm Au nanoparticles, nanowires, and polydimethylsiloxane (PDMS) are deposited onto the substrate through the nano/microaperture of a pulled pipette. Nano/microscale patterning is performed using a nanopipette/QTF-AFM, while position is resolved by monitoring the substrate with a custom OM. With this tool, one can perform surface characterization (force spectroscopy/microscopy) using the quartz tuning fork (QTF) sensor. Nanofabrication is achieved by accurately positioning target materials on the surface, and on-demand delivery and patterning of various solutions for molecular architecture.

Keywords

Surface characterization Nanopipette QTF-AFM Optical microscope
An, Sangmin, Baekman Sung, Haneol Noh, Corey Stambaugh, Soyoung Kwon, Kunyoung Lee, Bongsu Kim, Qhwan Kim, and Wonho Jhe. 2014. “Position-Resolved Surface Characterization and Nanofabrication Using an Optical Microscope Combined With a Nanopipette/Quartz Tuning Fork Atomic Force Microscope”. Nano-Micro Letters 6 (1):70-79. https://doi.org/10.1007/BF03353771.
Download Citation
Endnote/Zotero/Mendeley (RIS)
BibTeX
References
  1. D. Cyranoski, “Science education: Reading, writing and nanofabrication”, Nature 460, 171–172 (2009). http://dx.doi.org/10.1038/460171a
  2. B. D. Gates, Q. Xu, M. Stewart, D. Ryan, C. G. Willson and G. M. Whitesides, “New Approaches to Nanofabrication: Molding, Printing, and Other Techniques”, Chem. Rev. 105(4), 1171–1196 (2005). http://dx.doi.org/10.1021/cr030076o
  3. S. Y. Chou, P. R. Krauss and P. J. Renstrom, “Imprint lithography with 25-nanometer resolution”, Science 272(5258), 85–87 (1996). http://dx.doi.org/10.1126/science.272.5258.85
  4. D. R. S. Cumming, S. Thoms, S. P. Beaumont and J. M. R. Weaver, “Fabrication of 3 nm wires using 100 keV electron beam lithography and poly(methyl methacrylate) resist”, Appl. Phys. Lett. 68(3), 322–324 (1996). http://dx.doi.org/10.1063/1.116073
  5. M. Remeika and A. Bezryadin, “Sub-10 nanometre fabrication: molecular templating, electron-beam sculpting and crystallization of metallic nanowires”, Nanotechnology 16(8), 1172–1176 (2005). http://dx.doi.org/10.1088/0957-4484/16/8/032
  6. R. D. Piner, J. Zhu, F. Xu, S. Hong and C. A. Mirkin, “Dip-pen nanolithography”, Science 283(5402), 661–663 (1999). http://dx.doi.org/10.1126/science.283.5402.661
  7. S. Hong, J. Zhu and C. A. Mirkin, “Multiple ink nanolithography: toward a multiple-pen nano-plotter”, Science 286(5439), 523–525 (1999). http://dx.doi.org/10.1126/science.286.5439.523
  8. M. Hong, J. Bae, K. Kim and W. Jhe, “Scanning nanolithography using a material-filled nanopipette”, Appl. Phys. Lett. 77(16), 2604–2606 (2000). http://dx.doi.org/10.1063/1.1319181
  9. A. Bruckbauer, L. Ying, A. M. Rothery, D. Zhou, A. I. Shevchuk, C. Abell, Y. E. Korchev and D. Klenerman, “Writing with DNA and protein using a nanopipet for controlled delivery”, J. Am. Chem. Soc. 124(30), 8810–8811 (2002). http://dx.doi.org/10.1021/ja026816c
  10. F. Iwata, S. Nagami, Y. Sumiya and A. Sasaki, “Nanometre-scale deposition of colloidal Au particles using electrophoresis in a nanopipette probe”, Nanotechnology 18(10), 105301 (2007). http://dx.doi.org/10.1088/0957-4484/18/10/105301
  11. A. Meister, M. Liley, J. Brugger, R. Pugin and H. Heinzelmann, “Nanodispenser for attoliter volume deposition using atomic force microscopy probes modified by focused-ion-beam milling”, Appl. Phys. Lett. 85(25), 6260–6262 (2004). http://dx.doi.org/10.1063/1.1842352
  12. S. Deladi, N. R. Tas, J. W. Berenschot, G. J. M. Krijnen, M. J. de Boer, J. H. de Boer, M. Peter and M. C. Elwenspoek, “Micromachined fountain pen for atomic force microscope-based nanopatterning”, Appl. Phys. Lett. 85(22), 5361–5363 (2004). http://dx.doi.org/10.1063/1.1823040
  13. A. Fang, E. Dujardin and T. Ondarcuhu, “Control of droplet size in liquid nanodispensing”, Nano Lett. 6(10), 2368–2374 (2006). http://dx.doi.org/10.1021/nl061694y
  14. B. M. Kim, T. Murray and H. H. Bau, “The fabrication of integrated carbon pipes with sub micron diameters”, Nanotechnology 16(8), 1317–1320 (2005). http://dx.doi.org/10.1088/0957-4484/16/8/056
  15. M. Schrlau and H. H. Bau, “Carbon-based Nanoprobes for cell biology”, Micro Nano Fluid 7(4), 439–450 (2009). http://dx.doi.org/10.1007/s10404-009-0458-x
  16. J. A. Thompson and H. H. Bau, “Microfluidic beadbased assay: theory and experiments”, J.Chrom. B. 878(2), 228–236 (2010). http://dx.doi.org/10.1016/j.jchromb.2009.08.050
  17. J. Thompson, X. Du, J. M. Grogan, M. Schrlau and H. H. Bau, “Polymeric microbead arrays for microfluidic applications”, J.Micromech. Microeng. 20(11), 115017 (2010). http://dx.doi.org/10.1088/0960-1317/20/11/115017
  18. S. Ito and F. Iwata, “Nanometer-scale deposition of metal plating using a nanopipette probe in liquid condition”, Jpn. J. Appl. Phys. 50, 08LB15 (2011). http://dx.doi.org/10.1143/JJAP.50.08LB15
  19. A. Lewis, Y. Kheifetz, E. Shambrodt, A. Radko, C. Sukenik and E. Khatchatryan, “Fountain pen nanochemistry: atomic force control of chrome etching”, Appl. Phys. Lett. 75(17), 2689–2691 (1999). http://dx.doi.org/10.1063/1.125120
  20. R. R. Gruter, J. Voros and T. Zambelli, “FluidFM as a lithography tool in liquid: spatially controlled deposition offluorescent nanoparticles”, Nanoscale 5(3), 1097 (2013). http://dx.doi.org/10.1039/C2NR33214K
  21. F. J. Giessibl, “Atomic resolution of the silicon (111)-(7x7) surface by atomic force microscopy”, Science 267(5194), 68–71 (1995). http://dx.doi.org/10.1126/science.267.5194.68
  22. F. J. Giessibl, “Advances in atomic force microscopy”, Rev. Mod. Phys. 75(3), 949 (2003). http://dx.doi.org/10.1103/RevModPhys.75.949
  23. M. Lee, B. Sung, N. Hashemi and W. Jhe, “Study of a nanoscale water cluster by atomic force microscopy”, Faraday Discuss. 141, 415–421 (2009). http://dx.doi.org/10.1039/B807740C
  24. H. Choe, M.-H. Hong, Y. Seo, K. Lee, G. Kim, Y. Cho, J. Ihm and W. Jhe, “Formation, manipulation, and elasticity measurement of a nanometric column of water molecules”, Phys. Rev.Lett. 95(18), 187801 (2005). http://dx.doi.org/10.1103/PhysRevLett.95.187801
  25. M. Lee and W. Jhe, “General theory of amplitude-modulation atomic force microscopy”, Phys. Rev. Lett. 97(3), 036104 (2006). http://dx.doi.org/10.1103/PhysRevLett.97.036104
  26. S. An, J. Kim, K. Lee, B. Kim, M. Lee and W. Jhe, “Mechanical properties of the nanoscale molecular cluster of water meniscus by high-precision frequency modulation atomic force spectroscopy”, Appl. Phys. Lett. 101(5), 053114 (2012). http://dx.doi.org/10.1063/1.4740083
  27. M. Lee, J. Jahng, K. Kim and W. Jhe, “Quantitative atomic force measurement with a quartz tuning fork”, Appl. Phys. Lett. 91(2), 023117 (2007). http://dx.doi.org/10.1063/1.2756125
  28. S. An, M. Hong, J. Kim, S. Kwon, K. Lee, M. Lee and W. Jhe, “Quartz tuning fork-based frequency modulation atomic force spectroscopy and microscopy with all digital phase-locked loop”, Rev. Sci. Instrum. 83(11), 113705 (2012). http://dx.doi.org/10.1063/1.4765702
  29. S. An, C. Stambaugh, G. Kim, M. Lee, Y. Kim, K. Lee and W. Jhe, “Low-volume liquid delivery and nanolithography using a nanopipette combined with a quartz tuning fork-atomic force microscope”, Nanoscale 4(20), 6493–6500 (2012). http://dx.doi.org/10.1039/C2NR30972F
  30. J. K. Hwang, S. Cho, J. M. Dang, E. B. Kwak, K. Song, J. Moon and M. M. Sung, “Direct nanoprinting by liquid-bridge-mediated nanotransfer moulding”, Nat. Nanotech. 5, 742–748 (2010). http://dx.doi.org/10.1038/nnano.2010.175
  31. J. Park, M. Hardy, J. Kang, K. Barton, K. Adair, D. K. Mukhopadhyay, C. Lee, M. S. Strano, A. G. Alleyne, J. G. Georgiadis, P. M. Ferreira and J. A. Rogers, “High-resolution electrohydrodynamic jet printing”, Nat. Mater. 6, 782–789 (2007). http://dx.doi.org/10.1038/nmat1974
  32. R. S. Wagner and W. C. Ellis, “Vapor-liquid-solid mechanism of single crystal growth”, Appl. Phys. Lett. 4(5), 89–90 (1964). http://dx.doi.org/10.1063/1.1753975
  33. M. Liu, Y. Chen, Q. Guo, R. Li, X. Sun and J. Yang, “Controllable positioning and alignment of silver nanowires by tunable hydrodynamic focusing”, Nanotechnology 22(12), 125302 (2011). http://dx.doi.org/10.1088/0957-4484/22/12/125302
  34. A. W. Maijenburg, M. G. Maas, E. J. B. Rodijk, W. Ahmed, E. S. Kooij, E. T. Carlen, D. H. A. Blank and J. E. ten Elshof, “Dielectrophoretic alignment of metal and metal oxide nanowires and nanotubes: a universal set of parameters for bridging pre-patterned microelectrodes”, J. Col. Inter. Sci. 355(2), 486–493 (2011). http://dx.doi.org/10.1016/j.jcis.2010.12.011
  35. A. A. S. Bhagat, P. Jothimuthu and I. Papautsky, “Photodefinable polydimethylsiloxane (PDMS) for rapid lab-on-a-chip prototyping”, Lab Chip 7(9), 1192–1197 (2007). http://dx.doi.org/10.1039/B704946C
  36. T. Scharnweber, R. Truckenmller, A. M. Schneider, A. Welle, M. Reinhardt and S. Giselbrecht, “Rapid prototyping of microstructures in polydimethylsiloxane (PDMS) by direct UV-lithography”, Lab Chip 11(7), 1368–1371 (2011). http://dx.doi.org/10.1039/C0LC00567C
  37. K. J. Regehr, M. Domenech, J. T. Koepsel, K. C. Carver, S. J. Ellison-Zelski, W. L. Murphy, L. A. Schuler, E. T. Alarid and D. J. Beebe, “Biological implications of polydimethylsiloxane-based microfluidic cell culture”, Lab Chip 9(15), 2132–2139 (2009). http://dx.doi.org/10.1039/B903043C
  38. L. Engel, J. Shklovsky, D. Schrieber, S. Krylov and Y. Shacham-Diamand, “Freestanding smooth micron-scale polydimethylsiloxane (PDMS) membranes by thermal imprinting”, J. Micromech.Microeng. 22(4), 045003 (2012). http://dx.doi.org/10.1088/0960-1317/22/4/045003
Read More
Author biographies are not available.
Download this PDF file
PDF
Statistic
Read Counter : 6820 Download : 5193