Issue

Vol. 15 (2023)

Green Fabrication of Freestanding Piezoceramic Films for Energy Harvesting and Virus Detection

https://doi.org/10.1007/s40820-023-01105-6
Shiyuan Liu
Department of Mechanical and Aerospace Engineering, Hong Kong University of Science and Technology, Clear Water Bay, Hong Kong, People’s Republic of China
Junchen Liao
Department of Biomedical Engineering, City University of Hong Kong, Hong Kong, Hong Kong SAR PRC
Xin Huang
Department of Mechanical and Aerospace Engineering, Hong Kong University of Science and Technology, Clear Water Bay, Hong Kong, People’s Republic of China
Zhuomin Zhang
Department of Mechanical and Aerospace Engineering, Hong Kong University of Science and Technology, Clear Water Bay, Hong Kong, People’s Republic of China
Weijun Wang
Department of Materials Science and Engineering, City University of Hong Kong, Hong Kong, Hong Kong SAR PRC
Xuyang Wang
Guangdong Provincial Key Laboratory of Functional Oxide Materials and Devices, Southern University of Science and Technology, Shenzhen 518055, Guangdong, People’s Republic of China
Yao Shan
Department of Mechanical and Aerospace Engineering, Hong Kong University of Science and Technology, Clear Water Bay, Hong Kong, People’s Republic of China
Pengyu Li
Department of Mechanical and Aerospace Engineering, Hong Kong University of Science and Technology, Clear Water Bay, Hong Kong, People’s Republic of China
Ying Hong
Department of Mechanical and Aerospace Engineering, Hong Kong University of Science and Technology, Clear Water Bay, Hong Kong, People’s Republic of China
Zehua Peng
Department of Mechanical and Aerospace Engineering, Hong Kong University of Science and Technology, Clear Water Bay, Hong Kong, People’s Republic of China
Xuemu Li
Department of Mechanical and Aerospace Engineering, Hong Kong University of Science and Technology, Clear Water Bay, Hong Kong, People’s Republic of China
Bee Luan Khoo
Department of Biomedical Engineering, City University of Hong Kong, Hong Kong, Hong Kong SAR PRC
Johnny C. Ho
Department of Materials Science and Engineering, City University of Hong Kong, Hong Kong, Hong Kong SAR PRC
Zhengbao Yang
Department of Mechanical and Aerospace Engineering, Hong Kong University of Science and Technology, Clear Water Bay, Hong Kong, People’s Republic of China

Corresponding Author: Zhengbao Yang

zbyang@ust.hk

Nano-Micro Letters, Vol. 15 (2023), Article Number: 131

Abstract

Most electronics such as sensors, actuators and energy harvesters need piezoceramic films to interconvert mechanical and electrical energy. Transferring the ceramic films from their growth substrates for assembling electronic devices commonly requires chemical or physical etching, which comes at the sacrifice of the substrate materials, film cracks, and environmental contamination. Here, we introduce a van der Waals stripping method to fabricate large-area and freestanding piezoceramic thin films in a simple, green, and cost-effective manner. The introduction of the quasi van der Waals epitaxial platinum layer enables the capillary force of water to drive the separation process of the film and substrate interface. The fabricated lead-free film, Ba0.85Ca0.15Zr0.1Ti0.9O3 (BCZT), shows a high piezoelectric coefficient d33 = 209 ± 10 pm V−1 and outstanding flexibility of maximum strain 2%. The freestanding feature enables a wide application scenario, including micro energy harvesting, and covid-19 spike protein detection. We further conduct a life cycle analysis and quantify the low energy consumption and low pollution of the water-based stripping film method.


Highlights:


1 Freestanding lead-free piezoceramic thin films can be derived via water peeling.
2 The d33 value of the freestanding BCZT thin film reaches 209 pm V−1.
3 The freestanding piezoceramic films obtain versatile application scenarios such as energy harvest and virus detection.

Keywords

Van der Waals Water stripping Freestanding oxide films Energy harvesting Virus sensor
Liu, Shiyuan, Junchen Liao, Xin Huang, Zhuomin Zhang, Weijun Wang, Xuyang Wang, Yao Shan, Pengyu Li, Ying Hong, Zehua Peng, Xuemu Li, Bee Luan Khoo, Johnny C. Ho, and Zhengbao Yang. 2023. “Green Fabrication of Freestanding Piezoceramic Films for Energy Harvesting and Virus Detection”. Nano-Micro Letters 15 (May):131. https://doi.org/10.1007/s40820-023-01105-6.
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References
  1. H.S. Wang, S.K. Hong, J.H. Han, Y.H. Jung, H.K. Jeong et al., Biomimetic and flexible piezoelectric mobile acoustic sensors with multiresonant ultrathin structures for machine learning biometrics. Sci. Adv. 7, eabe5683 (2023). https://doi.org/10.1126/sciadv.abe5683
  2. D.Y. Park, D.J. Joe, D.H. Kim, H.H. Park, J.H. Han et al., Self-powered real-time arterial pulse monitoring using ultrathin epidermal piezoelectric sensors. Adv. Mater. 29, 1702308 (2017). https://doi.org/10.1002/adma.201702308
  3. J.H. Han, K.-I. Park, C.K. Jeong, Dual-structured flexible piezoelectric film energy harvesters for effectively integrated performance. Sensors 19(6), 1444 (2019). https://doi.org/10.3390/s19061444
  4. D.Y. Hyeon, K.-I. Park, Piezoelectric flexible energy harvester based on BaTiO3 thin film enabled by exfoliating the mica substrate. Energy Technol. 7, 1900638 (2019). https://doi.org/10.1002/ente.201900638
  5. T. Wang, R.-C. Peng, W. Peng, G. Dong, C. Zhou et al., 2–2 Type PVDF-based composites interlayered by epitaxial (111)-oriented BTO films for high energy storage density. Adv. Funct. Mater. 32(10), 2108496 (2021). https://doi.org/10.1002/adfm.202108496
  6. B. Peng, R. Peng, Y. Zhang, G. Dong, Z. Zhou, Phase transition enhanced superior elasticity in freestanding single-crystalline multiferroic BiFeO3 membranes. Sci. Adv. 6, eaba5847 (2020). https://doi.org/10.1126/sciadv.aba584
  7. T. Xu, J. Miao, Z. Wang, L. Yu, C.M. Li, Micro-piezoelectric immunoassay chip for simultaneous detection of Hepatitis B virus and α-fetoprotein. Sens. Actuators B Chem. 151, 370 (2011). https://doi.org/10.1016/j.snb.2010.08.013
  8. H. Ma, X. Xiao, Y. Wang, Y. Sun, B. Wang et al., Wafer-scale freestanding vanadium dioxide film. Sci. Adv. 7, eabk3438 (2022). https://doi.org/10.1126/sciadv.abk3438
  9. T.D. Nguyen, N. Deshmukh, J.M. Nagarah, T. Kramer, P.K. Purohit et al., Piezoelectric nanoribbons for monitoring cellular deformations. Nat. Nanotechnol. 7, 587 (2012). https://doi.org/10.1038/nnano.2012.112
  10. X. Wu, X. Li, J. Ping, Y. Ying, Recent advances in water-driven triboelectric nanogenerators based on hydrophobic interfaces. Nano Energy 90, 106592 (2021). https://doi.org/10.1016/j.nanoen.2021.106592
  11. S. Dai, X. Li, C. Jiang, J. Ping, Y. Ying, Triboelectric nanogenerators for smart agriculture. InfoMat 5, e12391 (2023). https://doi.org/10.1002/inf2.12391
  12. M.A. Gabris, J. Ping, Carbon nanomaterial-based nanogenerators for harvesting energy from environment. Nano Energy 90, 106494 (2021). https://doi.org/10.1016/j.nanoen.2021.106494
  13. S. Liu, Y. Shan, Y. Hong, Y. Jin, W. Lin et al., 3D conformal fabrication of piezoceramic films. Adv. Sci. 9(18), 2106030 (2022). https://doi.org/10.1002/advs.202106030
  14. K. Il Park, J.H. Son, G.T. Hwang, C.K. Jeong, J. Ryu et al., Highly-efficient, flexible piezoelectric PZT thin film nanogenerator on plastic substrates. Adv. Mater. 26, 2514 (2014). https://doi.org/10.1002/adma.201305659
  15. H. Wang, X. Zhang, N. Wang, Y. Li, X. Feng et al., Ultralight, scalable, and high-temperature–resilient ceramic nanofiber sponges. Sci. Adv. 3, e1603170 (2022). https://doi.org/10.1126/sciadv.1603170
  16. Z. Zhang, S. Liu, Q. Pan, Y. Hong, Y. Shan et al., Van der Waals exfoliation processed biopiezoelectric submucosa ultrathin films. Adv. Mater. 34(26), 2200864 (2022). https://doi.org/10.1002/adma.202200864
  17. S. Liu, Z. Zhang, Y. Shan, Y. Hong, F. Farooqui et al., A flexible and lead-free BCZT thin film nanogenerator for biocompatible energy harvesting. Mater. Chem. Front. 5, 4682 (2021). https://doi.org/10.1039/D1QM00145K
  18. S. Liu, D. Zou, X. Yu, Z. Wang, Z. Yang, Transfer-free PZT thin films for flexible nanogenerators derived from a single-step modified sol–gel process on 2D mica. ACS Appl. Mater. Interfaces 12(49), 54991 (2020). https://doi.org/10.1021/acsami.0c16973
  19. W. Ming, B. Huang, S. Zheng, Y. Bai, J. Wang et al., Flexoelectric engineering of van der Waals ferroelectric CuInP2S6. Sci. Adv. 8, eabq1232 (2023). https://doi.org/10.1126/sciadv.abq1232
  20. M. Shehzad, Y. Wang, Flexible and transparent flexoelectric microphone. Adv. Mater. Technol. 8, 2200908 (2023). https://doi.org/10.1002/admt.202200908
  21. Y. Liu, L. Ding, L. Dai, X. Gao, H. Wu et al., All-ceramic flexible piezoelectric energy harvester. Adv. Funct. Mater. 32, 2209297 (2022). https://doi.org/10.1002/adfm.202209297
  22. D. Wang, G. Yuan, G. Hao, Y. Wang, All-inorganic flexible piezoelectric energy harvester enabled by two-dimensional mica. Nano Energy 43, 351 (2018). https://doi.org/10.1016/j.nanoen.2017.11.037
  23. A. Koma, Van der Waals epitaxy—a new epitaxial growth method for a highly lattice-mismatched system. Thin Solid Films 216, 72 (1992). https://doi.org/10.1016/0040-6090(92)90872-9
  24. J. Jie, B. Yugandhar, H. Chun-Wei, D.T. Hien, L. Heng-Jui et al., Flexible ferroelectric element based on van der Waals heteroepitaxy. Sci. Adv. 3, e1700121 (2017). https://doi.org/10.1126/sciadv.170012
  25. Y. Zhang, M. Xie, J. Roscow, C. Bowen, Dielectric and piezoelectric properties of porous lead-free 0.5Ba(Ca0.8Zr0.2)O3-0.5(Ba0.7Ca0.3)TiO3 ceramics. Mater. Res. Bull. 112, 426 (2019). https://doi.org/10.1016/j.materresbull.2018.08.031
  26. A.A. Griffith, G.I. Taylor, The phenomena of rupture and flow in solids. Philos. Trans. R. Soc. Lond. Ser. A Contain. Pap. Math. Phys. Character 221, 163 (1921). https://doi.org/10.1098/rsta.1921.0006
  27. K. Kendall, Thin-film peeling-the elastic term. J. Phys. D-Appl. Phys. 8, 1449 (1975). https://doi.org/10.1088/0022-3727/8/13/005
  28. K. Kendall, The adhesion and surface energy of elastic solids. J. Phys. D-Appl. Phys. 4, 1186 (1971). https://doi.org/10.1088/0022-3727/4/8/320
  29. S. Khodaparast, F. Boulogne, C. Poulard, H.A. Stone, Water-based peeling of thin hydrophobic films. Phys. Rev. Lett. 119, 154502 (2017). https://doi.org/10.1103/PhysRevLett.119.154502
  30. H.D. Phan, Y. Kim, J. Lee, R. Liu, Y. Choi et al., Ultraclean and direct transfer of a wafer-scale MoS2 thin film onto a plastic substrate. Adv. Mater. 29, 1603928 (2017). https://doi.org/10.1002/adma.201603928
  31. H.S. Kum, H. Lee, S. Kim, S. Lindemann, W. Kong et al., Heterogeneous integration of single-crystalline complex-oxide membranes. Nature 578, 75 (2020). https://doi.org/10.1038/s41586-020-1939-z
  32. S.W. Song, S. Lee, J.K. Choe, N.-H. Kim, J. Kang et al., Direct 2D-to-3D transformation of pen drawings. Sci. Adv. 7, eabf3804 (2022). https://doi.org/10.1126/sciadv.abf3804
  33. D.S. Wie, Y. Zhang, M.K. Kim, B. Kim, S. Park et al., Wafer-recyclable, environment-friendly transfer printing for large-scale thin-film nanoelectronics. Proc. Natl. Acad. Sci. 115, E7236 (2018). https://doi.org/10.1073/pnas.1806640115
  34. Y. Zhang, M. Yin, Y. Baek, K. Lee, G. Zangari et al., Capillary transfer of soft films. Proc. Natl. Acad. Sci. 117, 5210 (2020). https://doi.org/10.1073/pnas.2000340117
  35. O. Guillon, F. Thiebaud, D. Perreux, Tensile fracture of soft and hard PZT. Int. J. Fract. 117, 235 (2002). https://doi.org/10.1023/A:1022072500963
  36. C.K. Jeong, K.-I. Park, J.H. Son, G.-T. Hwang, S.H. Lee et al., Self-powered fully-flexible light-emitting system enabled by flexible energy harvester. Energy Environ. Sci. 7, 4035 (2014). https://doi.org/10.1039/C4EE02435D
  37. Y. Zhang, C.K. Jeong, T. Yang, H. Sun, L.Q. Chen et al., Bioinspired elastic piezoelectric composites for high-performance mechanical energy harvesting. J. Mater. Chem. A 6, 14546 (2018). https://doi.org/10.1039/C8TA03617A
  38. X. Jiang, D. Wang, M. Sun, N. Zheng, S. Jia et al., Microstructure and electric properties of BCZT thin films with seed layers. RSC Adv. 7, 49962 (2017). https://doi.org/10.1039/C7RA10101E
  39. G. Kang, K. Yao, J. Wang, Advances in sintering research. J. Am. Ceram. Soc. 95, 986 (2012). https://doi.org/10.1111/j.1551-2916.2012.05312.x
  40. S.R. Reddy, V.V. Bhanu Prasad, S. Bysakh, V. Shanker, J. Joardar et al., Lead-reduced Bi(Ni2/3Ta1/3)O3-PbTiO3 perovskite ceramics with high Curie temperature and performance. J. Am. Ceram. Soc. 102, 1277 (2019). https://doi.org/10.1111/jace.15962
  41. A. Piorra, A. Petraru, H. Kohlstedt, M. Wuttig, E. Quandt, Piezoelectric properties of 0.5(Ba0.7Ca0.3TiO3)–0.5[Ba(Zr0.2Ti0.8)O3] ferroelectric lead-free laser deposited thin films. J. Appl. Phys. 109, 104101 (2011). https://doi.org/10.1063/1.3572056
  42. N.D. Scarisoreanu, F. Craciun, V. Ion, R. Birjega, A. Bercea et al., Lead-free piezoelectric (Ba, Ca)(Zr, Ti)O3 thin films for biocompatible and flexible devices. ACS Appl. Mater. Interfaces 9, 266 (2017). https://doi.org/10.1021/acsami.6b14774
  43. W.L. Li, T.D. Zhang, Y.F. Hou, Y. Zhao, D. Xu et al., Giant piezoelectric properties of BZT–0.5BCT thin films induced by nanodomain structure. RSC Adv. 4, 56933 (2014). https://doi.org/10.1039/C4RA08280J
  44. B.C. Luo, D.Y. Wang, M.M. Duan, S. Li, Orientation-dependent piezoelectric properties in lead-free epitaxial 0.5BaZr0.2Ti0.8O3–0.5Ba0.7Ca0.3TiO3 thin films. Appl. Phys. Lett. 103, 122903 (2013). https://doi.org/10.1063/1.4821918
  45. B.C. Luo, D.Y. Wang, M.M. Duan, S. Li, Growth and characterization of lead-free piezoelectric BaZr0.2Ti0.8O3–Ba0.7Ca0.3TiO3 thin films on Si substrates. Appl. Surf. Sci. 270, 377 (2013). https://doi.org/10.1016/j.apsusc.2013.01.033
  46. F. Narita, Z. Wang, H. Kurita, Z. Li, Y. Shi et al., A review of piezoelectric and magnetostrictive biosensor materials for detection of COVID-19 and other viruses. Adv. Mater. 33, 2005448 (2021). https://doi.org/10.1002/adma.202005448
  47. Y.Q. Fu, J.K. Luo, N.T. Nguyen, A.J. Walton, A.J. Flewitt et al., Advances in piezoelectric thin films for acoustic biosensors, acoustofluidics and lab-on-chip applications. Prog. Mater. Sci. 89, 31 (2017). https://doi.org/10.1016/j.pmatsci.2017.04.006
  48. Abdullah, A. Rasheed, A. Younis, M. A. Khan, in 2021 IEEE 15th International Conference on Nano/Molecular Medicine and Engineering (2021), pp. 34–37
  49. G. Li, Z. Qiu, Y. Wang, Y. Hong, Y. Wan et al., PEDOT:PSS/grafted-PDMS electrodes for fully organic and intrinsically stretchable skin-like electronics. ACS Appl. Mater. Interfaces 11, 10373 (2019). https://doi.org/10.1021/acsami.8b20255
  50. J.S. Lee, B.H. Shin, B.Y. Yoo, S.-Y. Nam, M. Lee et al., Modulation of foreign body reaction against PDMS implant by grafting topographically different poly(acrylic acid) micropatterns. Macromol. Biosci. 19, 1900206 (2019). https://doi.org/10.1002/mabi.201900206
  51. A. Ahmed, I. Hassan, T. Ibn-Mohammed, H. Mostafa, I.M. Reaney et al., Environmental life cycle assessment and techno-economic analysis of triboelectric nanogenerators. Energy Environ. Sci. 10, 653 (2017). https://doi.org/10.1039/C7EE00158D
  52. T. Ibn-Mohammed, S.C.L. Koh, I.M. Reaney, A. Acquaye, D. Wang et al., Integrated hybrid life cycle assessment and supply chain environmental profile evaluations of lead-based (lead zirconate titanate) versus lead-free (potassium sodium niobate) piezoelectric ceramics. Energy Environ. Sci. 9, 3495 (2016). https://doi.org/10.1039/C6EE02429G
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