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Vol. 7 No. 4 (2015)

Effects Associated with Nanostructure Fabrication Using In Situ Liquid Cell TEM Technology

https://doi.org/10.1007/s40820-015-0054-4
Xin Chen
Shanghai Key Laboratory of Advanced Polymeric Materials, and Key Laboratory for Ultrafine Materials of Ministry of Education, School of Materials Science and Engineering, East China University of Science and Technology, 130 Meilong Road, Shanghai 200237, People’s Republic of China
Lihui Zhou
East China University of Science and Technology, 130 Meilong Road, Shanghai 200237, People’s Republic of China
Ping Wang
State Key Laboratory of Bioreactor Engineering, Biomedical Nanotechnology Center, East China University of Science and Technology, Shanghai 200237, People’s Republic of China
Hongliang Cao
Shanghai Key Laboratory of Advanced Polymeric Materials, and Key Laboratory for Ultrafine Materials of Ministry of Education, School of Materials Science and Engineering, East China University of Science and Technology, 130 Meilong Road, Shanghai 200237, People’s Republic of China
Xiaoli Miao
Shanghai Key Laboratory of Advanced Polymeric Materials, and Key Laboratory for Ultrafine Materials of Ministry of Education, School of Materials Science and Engineering, East China University of Science and Technology, 130 Meilong Road, Shanghai 200237, People’s Republic of China
Feifei Wei
Shanghai Key Laboratory of Advanced Polymeric Materials, and Key Laboratory for Ultrafine Materials of Ministry of Education, School of Materials Science and Engineering, East China University of Science and Technology, 130 Meilong Road, Shanghai 200237, People’s Republic of China
Xia Chen
Shanghai Key Laboratory of Advanced Polymeric Materials, and Key Laboratory for Ultrafine Materials of Ministry of Education, School of Materials Science and Engineering, East China University of Science and Technology, 130 Meilong Road, Shanghai 200237, People’s Republic of China

Corresponding Author: Xin Chen

xinchen73@ecust.edu.cn

Nano-Micro Letters, Vol. 7 No. 4 (2015), Article Number: 385-391

Abstract

We studied silicon, carbon, and SiC x nanostructures fabricated using liquid-phase electron-beam-induced deposition technology in transmission electron microscopy systems. Nanodots obtained from fixed electron beam irradiation followed a universal size versus beam dose trend, with precursor concentrations from pure SiCl4 to 0 % SiCl4 in CH2Cl2, and electron beam intensity ranges of two orders of magnitude, showing good controllability of the deposition. Secondary electrons contributed to the determination of the lateral sizes of the nanostructures, while the primary beam appeared to have an effect in reducing the vertical growth rate. These results can be used to generate donut-shaped nanostructures. Using a scanning electron beam, line structures with both branched and unbranched morphologies were also obtained. The liquid-phase electron-beam-induced deposition technology is shown to be an effective tool for advanced nanostructured material generation.

Keywords

Electron-beam-induced deposition In situ TEM Nanostrucutre Semiconductor Nanolithography
Chen, Xin, Lihui Zhou, Ping Wang, Hongliang Cao, Xiaoli Miao, Feifei Wei, and Xia Chen. 2015. “Effects Associated With Nanostructure Fabrication Using In Situ Liquid Cell TEM Technology”. Nano-Micro Letters 7 (4):385-91. https://doi.org/10.1007/s40820-015-0054-4.
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