Issue

Vol. 17 (2025)

Direct Photolithography of WOx Nanoparticles for High-Resolution Non-Emissive Displays

https://doi.org/10.1007/s40820-024-01563-6
Chang Gu
Laboratory of Optoelectronic Information Technology and Devices, Ningbo Institute of Materials Technology and Engineering, Chinese Academy of Sciences, Ningbo 315201, People’s Republic of China
Guojian Yang
Laboratory of Optoelectronic Information Technology and Devices, Ningbo Institute of Materials Technology and Engineering, Chinese Academy of Sciences, Ningbo 315201, People’s Republic of China
Wenxuan Wang
Laboratory of Optoelectronic Information Technology and Devices, Ningbo Institute of Materials Technology and Engineering, Chinese Academy of Sciences, Ningbo 315201, People’s Republic of China
Aiyan Shi
Laboratory of Optoelectronic Information Technology and Devices, Ningbo Institute of Materials Technology and Engineering, Chinese Academy of Sciences, Ningbo 315201, People’s Republic of China
Wenjuan Fang
Laboratory of Optoelectronic Information Technology and Devices, Ningbo Institute of Materials Technology and Engineering, Chinese Academy of Sciences, Ningbo 315201, People’s Republic of China
Lei Qian
Laboratory of Optoelectronic Information Technology and Devices, Ningbo Institute of Materials Technology and Engineering, Chinese Academy of Sciences, Ningbo 315201, People’s Republic of China
Xiaofei Hu
Laboratory of Optoelectronic Information Technology and Devices, Ningbo Institute of Materials Technology and Engineering, Chinese Academy of Sciences, Ningbo 315201, People’s Republic of China
Ting Zhang
Laboratory of Optoelectronic Information Technology and Devices, Ningbo Institute of Materials Technology and Engineering, Chinese Academy of Sciences, Ningbo 315201, People’s Republic of China
Chaoyu Xiang
Laboratory of Optoelectronic Information Technology and Devices, Ningbo Institute of Materials Technology and Engineering, Chinese Academy of Sciences, Ningbo 315201, People’s Republic of China
Yu‑Mo Zhang
State Key Lab of Supramolecular Structure and Materials, College of Chemistry, Jilin University, Changchun 130012, People’s Republic of China

Corresponding Author: Yu‑Mo Zhang

zhangyumo@jlu.edu.cn

Nano-Micro Letters, Vol. 17 (2025), Article Number: 67

Abstract

High-resolution non-emissive displays based on electrochromic tungsten oxides (WOx) are crucial for future near-eye virtual/augmented reality interactions, given their impressive attributes such as high environmental stability, ideal outdoor readability, and low energy consumption. However, the limited intrinsic structure of inorganic materials has presented a significant challenge in achieving precise patterning/pixelation at the micron scale. Here, we successfully developed the direct photolithography for WOx nanoparticles based on in situ photo-induced ligand exchange. This strategy enabled us to achieve ultra-high resolution efficiently (line width < 4 µm, the best resolution for reported inorganic electrochromic materials). Additionally, the resulting device exhibited impressive electrochromic performance, such as fast response (< 1 s at 0 V), high coloration efficiency (119.5 cm2 C−1), good optical modulation (55.9%), and durability (> 3600 cycles), as well as promising applications in electronic logos, pixelated displays, flexible electronics, etc. The success and advancements presented here are expected to inspire and accelerate research and development (R&D) in high-resolution non-emissive displays and other ultra-fine micro-electronics.


Highlights:
1 Direct photolithography of electrochromic WOx nanoparticles via in situ photo-induced ligand exchange is proposed and demonstrated.
2 The highest resolution among inorganic electrochromics (< 4 µm) is achieved, which is promising in high-resolution non-emissive displays.
3 The as-prepared device exhibits highly remarkable performance including rapid response, high coloration efficiency and durability.

Keywords

Electrochromic Direct photolithography WOx nanoparticles In situ photo-induced ligand exchange High-resolution displays
Gu, Chang, Guojian Yang, Wenxuan Wang, Aiyan Shi, Wenjuan Fang, Lei Qian, Xiaofei Hu, Ting Zhang, Chaoyu Xiang, and Yu‑Mo Zhang. 2024. “Direct Photolithography of WOx Nanoparticles for High-Resolution Non-Emissive Displays”. Nano-Micro Letters 17 (November):67. https://doi.org/10.1007/s40820-024-01563-6.
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