Full-Photolithographic High-Density Skin-Like Transistor Arrays for All-Organic Active-Matrix Displays
Corresponding Author: Qingxin Tang
Nano-Micro Letters,
Vol. 18 (2026), Article Number: 270
Abstract
Organic thin-film transistors (OTFTs) are widely recognized as promising building blocks for next-generation flexible and wearable electronics. However, scalable fabrication of high-density OTFT arrays for active-matrix applications remains highly challenging, primarily due to the incompatibility of conventional photolithography with organic semiconductors. Here, we report an all-photolithographic strategy that enables the scalable fabrication of flexible OTFT arrays with both high device density and superior charge transport characteristics. By combining synergistic interfacial modulation and dual-protection photolithography strategy of organic semiconductors, we successfully fabricated transistor arrays exhibiting an average mobility above 1.0 cm2 V−1 s−1 and on/off ratios of ~ 105. This scalable method further enables an integration density of 6.25 × 104 cm−2, which is one of the highest densities reported to date for full-photolithographic OTFT active-matrix arrays. Moreover, we demonstrate seamless integration of OTFT active-matrix arrays with organic light-emitting diodes (OLEDs), yielding all-organic active-matrix OLED (AMOLED) arrays. These devices exhibit stable electroluminescence, ultralight weight (~ 24.3 g m−2), excellent flexibility, and skin-like display functionality with reliable pixel-level addressing. This work establishes a universal and scalable route toward high-density organic electronic systems, opening new opportunities for flexible displays, electronic skin, and next-generation wearable technologies.
Highlights:
1 A universal and scalable process fully compatible with organic semiconductors is developed, achieving precise micropatterning and high integration density of 6.25 × 104 cm−2.
2 All-organic active-matrix organic light-emitting diode arrays with skin-like deformability were successfully fabricated. Notably, the integrated system not only exhibits stable electroluminescence, ultralight weight (~24.3 g m−2), and strong conformability to complex surfaces but also paves a promising path for the development of next-generation flexible and wearable displays.
Keywords
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- P. Zhu, Z. Li, J. Pang, P. He, S. Zhang, Latest developments and trends in electronic skin devices. Soft Sci 4(2), 17 (2024). https://doi.org/10.20517/ss.2024.05
- Z. Yin, D. Wang, Y. Guo, Z. Zhao, L. Li et al., Electrohydrodynamic printing for high resolution patterning of flexible electronics toward industrial applications. InfoMat 6(2), e12505 (2024). https://doi.org/10.1002/inf2.12505
- A. Perevedentsev, M. Campoy-Quiles, Rapid and high-resolution patterning of microstructure and composition in organic semiconductors using ‘molecular gates.’ Nat. Commun. 11(1), 3610 (2020). https://doi.org/10.1038/s41467-020-17361-8
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- U. Zschieschang, H. Klauk, J.W. Borchert, High-resolution lithography for high-frequency organic thin-film transistors. Adv. Mater. Technol. 8(11), 2201888 (2023). https://doi.org/10.1002/admt.202201888
- M. Höppner, B. Kheradmand-Boroujeni, J. Vahland, M.F. Sawatzki, D. Kneppe et al., High-frequency operation of vertical organic field-effect transistors. Adv. Sci. 9(24), 2201660 (2022). https://doi.org/10.1002/advs.202201660
- S. Goettling, B. Diehm, N. Fruehauf, Active matrix OTFT display with anodized gate dielectric. J. Disp. Technol. 4(3), 300–303 (2008). https://doi.org/10.1109/JDT.2008.921903
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- S. Wang, J. Xu, W. Wang, G.N. Wang, R. Rastak et al., Skin electronics from scalable fabrication of an intrinsically stretchable transistor array. Nature 555(7694), 83–88 (2018). https://doi.org/10.1038/nature25494
- T. Wollandt, F. Letzkus, J.N. Burghartz, H. Klauk, Comparative study of silver and gold source/drain contacts for organic thin-film transistors with low contact resistance. Adv. Electron. Mater. 10(7), 2300841 (2024). https://doi.org/10.1002/aelm.202300841
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- K. Fukuda, Y. Takeda, Y. Yoshimura, R. Shiwaku, L.T. Tran et al., Fully-printed high-performance organic thin-film transistors and circuitry on one-micron-thick polymer films. Nat. Commun. 5, 4147 (2014). https://doi.org/10.1038/ncomms5147
- K. Fukuda, Y. Takeda, M. Mizukami, D. Kumaki, S. Tokito, Fully solution-processed flexible organic thin film transistor arrays with high mobility and exceptional uniformity. Sci. Rep. 4, 3947 (2014). https://doi.org/10.1038/srep03947
- H. Ren, J. Zhang, Y. Tong, J. Zhang, X. Zhao et al., Synchronously improved stretchability and mobility by tuning the molecular weight for intrinsically stretchable transistors. J. Mater. Chem. C 8(44), 15646–15654 (2020). https://doi.org/10.1039/D0TC02363A
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References
D. Liu, X. Wu, C. Gao, C. Li, Y. Zheng et al., Integrating unexpected high charge-carrier mobility and low-threshold lasing action in an organic semiconductor. Angew. Chem. Int. Ed. 61(25), e202200791 (2022). https://doi.org/10.1002/ange.202200791
J. Choi, M.J. Kim, J.-Y. Kim, E.K. Lee, C. Lee et al., The effect of alkyl chain length in organic semiconductor and surface polarity of polymer dielectrics in organic thin-film transistors (OTFTs). Small Methods 7(11), e2300628 (2023). https://doi.org/10.1002/smtd.202300628
C. Liao, Y. Xiong, Y. Fu, X. Chen, L.G. Occhipinti, Organic semiconductors based wearable bioelectronics. Wearable Electronics 2, 23–39 (2025). https://doi.org/10.1016/j.wees.2024.12.003
M. Eslamian, Inorganic and organic solution-processed thin film devices. Nano-Micro Lett. 9(1), 3 (2016). https://doi.org/10.1007/s40820-016-0106-4
K. Torikai, R. de Furlan Oliveira, D.H. de Starnini Camargo, C.C. Bof Bufon, Low-voltage, flexible, and self-encapsulated ultracompact organic thin-film transistors based on nanomembranes. Nano Lett. 18(9), 5552–5561 (2018). https://doi.org/10.1021/acs.nanolett.8b01958
S. Kim, J. Seo, J. Choi, H. Yoo, Vertically integrated electronics: new opportunities from emerging materials and devices. Nano-Micro Lett. 14(1), 201 (2022). https://doi.org/10.1007/s40820-022-00942-1
W. Zhao, K. Li, Z. Li, W. Wang, X. Yu et al., Flexible pressure sensor arrays with high sensitivity and high density based on spinous microstructures for carved patterns recognition. Adv. Funct. Mater. 35(11), 2417238 (2025). https://doi.org/10.1002/adfm.202417238
J. Ajayan, S. Sreejith, M. Manikandan, V. Bharath Sreenivasulu, N. Aruna Kumari et al., An intensive study on organic thin film transistors (OTFTs) for future flexible/wearable electronics applications. Micro Nanostruct. 187, 207766 (2024). https://doi.org/10.1016/j.micrna.2024.207766
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G. Chen, W. Yu, Y. Hao, G. Peng, X. Yu et al., Micron-scale resolution image sensor based on flexible organic thin film transistor arrays via femtosecond laser processing. IEEE Electron Device Lett. 43(2), 248–251 (2022). https://doi.org/10.1109/LED.2021.3133264
Z. Liu, Z. Yin, J. Wang, Q. Zheng, Polyelectrolyte dielectrics for flexible low-voltage organic thin-film transistors in highly sensitive pressure sensing. Adv. Funct. Mater. 29(1), 1806092 (2019). https://doi.org/10.1002/adfm.201806092
X. Ren, K. Pei, B. Peng, Z. Zhang, Z. Wang et al., A low-operating-power and flexible active-matrix organic-transistor temperature-sensor array. Adv. Mater. 28(24), 4832–4838 (2016). https://doi.org/10.1002/adma.201600040
T. Someya, M. Kaltenbrunner, T. Yokota, Ultraflexible organic electronics. MRS Bull. 40(12), 1130–1137 (2015). https://doi.org/10.1557/mrs.2015.277
O. Rodriguez-Lopez, P.E. Rocha-Flores, J. Maeng, S.F. Cogan, J.J. Pancrazio et al., Flexible a-IGZO TFT-based circuit for active addressing in neural stimulation electrode arrays. Adv. Mater. Technol. 8(23), 2301046 (2023). https://doi.org/10.1002/admt.202301046
L.A. Ruiz-Preciado, S. Baek, N. Strobel, K. Xia, M. Seiberlich et al., Monolithically printed all-organic flexible photosensor active matrix. NPJ Flex. Electron. 7, 6 (2023). https://doi.org/10.1038/s41528-023-00242-7
B. Bao, D.D. Karnaushenko, O.G. Schmidt, Y. Song, D. Karnaushenko, Active matrix flexible sensory systems: materials, design, fabrication, and integration. Adv. Intell. Syst. 4(10), 2100253 (2022). https://doi.org/10.1002/aisy.202100253
R. Chen, X. Wang, X. Li, H. Wang, M. He et al., A comprehensive nano-interpenetrating semiconducting photoresist toward all-photolithography organic electronics. Sci. Adv. 7(25), eabg0659 (2021). https://doi.org/10.1126/sciadv.abg0659
Z. Hao, Z. Wu, S. Liu, X. Tang, J. Chen et al., High-performance organic thin-film transistors: principles and strategies. J. Mater. Chem. C 12(26), 9427–9454 (2024). https://doi.org/10.1039/D4TC01240B
X. Zhao, S. Wang, Y. Ni, Y. Tong, Q. Tang et al., High-performance full-photolithographic top-contact conformable organic transistors for soft electronics. Adv. Sci. 8(9), 2004050 (2021). https://doi.org/10.1002/advs.202004050
D. He, J. Qiao, L. Zhang, J. Wang, T. Lan et al., Ultrahigh mobility and efficient charge injection in monolayer organic thin-film transistors on boron nitride. Sci. Adv. 3(9), e1701186 (2017). https://doi.org/10.1126/sciadv.1701186
X. Ye, X. Zhao, S. Wang, Z. Wei, G. Lv et al., Blurred electrode for low contact resistance in coplanar organic transistors. ACS Nano 15(1), 1155–1166 (2021). https://doi.org/10.1021/acsnano.0c08122
M.I. Nugraha, Y.-Y. Yang, Z. Liu, G.T. Harrison, R.E.A. Ardhi et al., Thiol carbazole self-assembled monolayers as tunable carrier injecting interlayers for organic transistors and complementary circuits. Adv. Mater. 37(5), 2413157 (2025). https://doi.org/10.1002/adma.202413157
J. Li, Y. Ni, X. Zhao, B. Wang, C. Xue et al., Vertically stacked skin-like active-matrix display with ultrahigh aperture ratio. Light. Sci. Appl. 13, 177 (2024). https://doi.org/10.1038/s41377-024-01524-z
P. Zhu, Z. Li, J. Pang, P. He, S. Zhang, Latest developments and trends in electronic skin devices. Soft Sci 4(2), 17 (2024). https://doi.org/10.20517/ss.2024.05
Z. Yin, D. Wang, Y. Guo, Z. Zhao, L. Li et al., Electrohydrodynamic printing for high resolution patterning of flexible electronics toward industrial applications. InfoMat 6(2), e12505 (2024). https://doi.org/10.1002/inf2.12505
A. Perevedentsev, M. Campoy-Quiles, Rapid and high-resolution patterning of microstructure and composition in organic semiconductors using ‘molecular gates.’ Nat. Commun. 11(1), 3610 (2020). https://doi.org/10.1038/s41467-020-17361-8
W. Zhao, R. Chen, L. Zhao, S. Zhang, X. Wang et al., Self-encapsulated N-type semiconducting photoresist toward complementary organic electronics. Adv. Funct. Mater. 34(40), 2407642 (2024). https://doi.org/10.1002/adfm.202407642
U. Zschieschang, H. Klauk, J.W. Borchert, High-resolution lithography for high-frequency organic thin-film transistors. Adv. Mater. Technol. 8(11), 2201888 (2023). https://doi.org/10.1002/admt.202201888
M. Höppner, B. Kheradmand-Boroujeni, J. Vahland, M.F. Sawatzki, D. Kneppe et al., High-frequency operation of vertical organic field-effect transistors. Adv. Sci. 9(24), 2201660 (2022). https://doi.org/10.1002/advs.202201660
S. Goettling, B. Diehm, N. Fruehauf, Active matrix OTFT display with anodized gate dielectric. J. Disp. Technol. 4(3), 300–303 (2008). https://doi.org/10.1109/JDT.2008.921903
E.K. Lee, C.H. Park, J. Lee, H.R. Lee, C. Yang et al., Chemically robust ambipolar organic transistor array directly patterned by photolithography. Adv. Mater. 29(11), 1605282 (2017). https://doi.org/10.1002/adma.201605282
Y. Li, R. Chen, Photolithographic patterning of organic semiconductors for organic field-effect transistors. Chem. Rev. 125(10), 4933–4973 (2025). https://doi.org/10.1021/acs.chemrev.4c00446
W. Deng, Y. Lv, X. Zhang, X. Fang, B. Lu et al., High-resolution patterning of organic semiconductor single crystal arrays for high-integration organic field-effect transistors. Mater. Today 40, 82–90 (2020). https://doi.org/10.1016/j.mattod.2020.06.004
D. Zhong, C. Wu, Y. Jiang, Y. Yuan, M.-G. Kim et al., High-speed and large-scale intrinsically stretchable integrated circuits. Nature 627(8003), 313–320 (2024). https://doi.org/10.1038/s41586-024-07096-7
S. Wang, J. Xu, W. Wang, G.N. Wang, R. Rastak et al., Skin electronics from scalable fabrication of an intrinsically stretchable transistor array. Nature 555(7694), 83–88 (2018). https://doi.org/10.1038/nature25494
T. Wollandt, F. Letzkus, J.N. Burghartz, H. Klauk, Comparative study of silver and gold source/drain contacts for organic thin-film transistors with low contact resistance. Adv. Electron. Mater. 10(7), 2300841 (2024). https://doi.org/10.1002/aelm.202300841
J.W. Borchert, B. Peng, F. Letzkus, J.N. Burghartz, P.K.L. Chan et al., Small contact resistance and high-frequency operation of flexible low-voltage inverted coplanar organic transistors. Nat. Commun. 10(1), 1119 (2019). https://doi.org/10.1038/s41467-019-09119-8
P. Xue, J. Li, X. Zhao, J. Zhang, X. Liu et al., High-toughness and high-ductility gold electrodes for high-performance deformable organic transistor arrays. Small Methods 9(11), e01452 (2025). https://doi.org/10.1002/smtd.202501452
W. Xu, Z. Hu, H. Liu, L. Lan, J. Peng et al., Flexible all-organic, all-solution processed thin film transistor array with ultrashort channel. Sci. Rep. 6, 29055 (2016). https://doi.org/10.1038/srep29055
J.A. Rogers, Z. Bao, K. Baldwin, A. Dodabalapur, B. Crone et al., Paper-like electronic displays: large-area rubber-stamped plastic sheets of electronics and microencapsulated electrophoretic inks. Proc. Natl. Acad. Sci. U. S. A. 98(9), 4835–4840 (2001). https://doi.org/10.1073/pnas.091588098
K. Fukuda, Y. Takeda, Y. Yoshimura, R. Shiwaku, L.T. Tran et al., Fully-printed high-performance organic thin-film transistors and circuitry on one-micron-thick polymer films. Nat. Commun. 5, 4147 (2014). https://doi.org/10.1038/ncomms5147
K. Fukuda, Y. Takeda, M. Mizukami, D. Kumaki, S. Tokito, Fully solution-processed flexible organic thin film transistor arrays with high mobility and exceptional uniformity. Sci. Rep. 4, 3947 (2014). https://doi.org/10.1038/srep03947
H. Ren, J. Zhang, Y. Tong, J. Zhang, X. Zhao et al., Synchronously improved stretchability and mobility by tuning the molecular weight for intrinsically stretchable transistors. J. Mater. Chem. C 8(44), 15646–15654 (2020). https://doi.org/10.1039/D0TC02363A
M. Tayu, A. Rahmanudin, G.J.P. Perry, R.U. Khan, D.J. Tate et al., Modular synthesis of unsymmetrical [1] benzothieno [3, 2-b] [1] benzothiophene molecular semiconductors for organic transistors. Chem. Sci. 13(2), 421–429 (2022).https://doi.org/10.1039/D1SC05070B