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Vol. 4 No. 4 (2012)

Ordered SrTiO3 Nanoripples Induced by Focused Ion Beam

https://doi.org/10.1007/BF03353721
Jiang Wu
State Key Laboratory of Electronic Thin Films and Integrated Devices, University of Electronic Science and Technology of China, Chengdu 610054, P. R. China
Gang Chen
Institute of Intelligent Optoelectronic Technology, Zhejiang University of Technology, Hangzhou 300123, P. R. China
Zhaoquan Zeng
Institute for Nanoscience and Engineering, University of Arkansas, Fayetteville, Arkansas 72701, USA
Shibin Li
State Key Laboratory of Electronic Thin Films and Integrated Devices, University of Electronic Science and Technology of China, Chengdu 610054, P. R. China
Xingliang Xu
State Key Laboratory of Electronic Thin Films and Integrated Devices, University of Electronic Science and Technology of China, Chengdu 610054, P. R. China
Zhiming M. Wang
State Key Laboratory of Electronic Thin Films and Integrated Devices, University of Electronic Science and Technology of China, Chengdu 610054, P. R. China
Gregory J. Salamo
Institute for Nanoscience and Engineering, University of Arkansas, Fayetteville, Arkansas 72701, USA

Corresponding Author: Zhiming M. Wang

zhmwang@uestc.edu.cn

Nano-Micro Letters, Vol. 4 No. 4 (2012), Article Number: 243-246

Abstract

Ordered nanoripples on the niobium-doped SrTiO3 surfaces were fabricated through focused ion beam bombardment. The surface morphology of the SrTiO3 nanoripples was characterized using in situ focused ion beam/scanning electron microscopy. The well-aligned SrTiO3 nanostructures were obtained under optimized ion irradiation conditions. The characteristic wavelength was measured as about 210 nm for different ion beam currents. The relationship between the ion irradiation time and current and SrTiO3 surface morphology was analyzed. The presented method will be an effective supplement for fabrication of SrTiO3 nanostructures that can be used for ferroelectric and electronic applications.

Keywords

SrTiO3 focused ion beam nanoripple self-assembly
Wu, Jiang, Gang Chen, Zhaoquan Zeng, Shibin Li, Xingliang Xu, Zhiming M. Wang, and Gregory J. Salamo. 2012. “Ordered SrTiO3 Nanoripples Induced by Focused Ion Beam”. Nano-Micro Letters 4 (4):243-46. https://doi.org/10.1007/BF03353721.
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